000 00725nam a2200205Ia 4500
008 160330s9999||||xx |||||||||||||| ||und||
020 _a9780387367989
_cEuro99.95 Rs.7356.32 and Euro 129.99, Rs. 11,673.10 (for acc. no. 90862)
040 _aCentral Library-NITS
041 _aEnglish
082 _a621.3815
_bKAR
100 _aEl-Kareh, Badih
245 _aSilicon devices and process integration : deep submicron and nano-scale technologies
_cby Badih El-Kareh
260 _aNew York
_bSpringer
_c2009
300 _axxv, 597 p. ; 25 cm
504 _aIncludes bibliographical references and index
521 _bSibly, Kolkata
650 _aElectronics and Communication Enginering
650 _aNanotechnology
942 _cBK
999 _c20417
_d20417