000 | 00937nam a2200241Ia 4500 | ||
---|---|---|---|
008 | 160330s9999||||xx |||||||||||||| ||und|| | ||
020 |
_a9780387245201 _cEuro 1059.00 (Rs.79425.00) 5vol.set price |
||
040 | _aCentral Library-NITS | ||
041 | _aEnglish | ||
082 |
_a620.5 _bMEM |
||
245 |
_aMEMS/NEMS handbook techniques and applications _cedited by Cornelius T. Leondes |
||
260 |
_aNew York _bSpringer _c2006 |
||
300 | _a5v. (xviii, 380; xviii, 332; xviii, 434, xviii, 386;xviii,556p.): ill ;20cm | ||
504 | _aIncludes bibliographical references and index | ||
505 | _av1: Design Method; v2: Fabrication Techniques; v3: Manufacturing Method; v4: Sensors and Actuators; v5: Medical Applications and MOEMS | ||
521 | _bRoam Books Int., New Delhi | ||
650 | _aManufacturing methods | ||
650 | _aME | ||
650 | _aMicroelectromechanical methods | ||
650 | _aNanotechnology | ||
700 | _aLeondes, Cornelius T. | ||
942 | _cBK | ||
999 |
_c21374 _d21374 |