000 00937nam a2200241Ia 4500
008 160330s9999||||xx |||||||||||||| ||und||
020 _a9780387245201
_cEuro 1059.00 (Rs.79425.00) 5vol.set price
040 _aCentral Library-NITS
041 _aEnglish
082 _a620.5
_bMEM
245 _aMEMS/NEMS handbook techniques and applications
_cedited by Cornelius T. Leondes
260 _aNew York
_bSpringer
_c2006
300 _a5v. (xviii, 380; xviii, 332; xviii, 434, xviii, 386;xviii,556p.): ill ;20cm
504 _aIncludes bibliographical references and index
505 _av1: Design Method; v2: Fabrication Techniques; v3: Manufacturing Method; v4: Sensors and Actuators; v5: Medical Applications and MOEMS
521 _bRoam Books Int., New Delhi
650 _aManufacturing methods
650 _aME
650 _aMicroelectromechanical methods
650 _aNanotechnology
700 _aLeondes, Cornelius T.
942 _cBK
999 _c21374
_d21374