| 000 | 00334nmm a2200133Ia 4500 | ||
|---|---|---|---|
| 008 | 160408s9999||||xx |||||||||||||||||und|| | ||
| 020 | _a9781437734836 | ||
| 041 | _aEnglish | ||
| 100 | _aWasa, Kiyotaka | ||
| 245 | _aHandbook of Sputter Deposition Technology | ||
| 260 | _bWilliam Andrew | ||
| 650 | _aEngineering 2012 | ||
| 942 | _cEB | ||
| 999 |
_c24703 _d24703 |
||