000			00326nmm a2200133Ia 4500
008			160408s9999||||xx |||||||||||||||||und||
020			_a9781437778731
041			_aEnglish
100			_aSeshan, Krishna
245			_aHandbook of Thin Film Deposition
260			_bWilliam Andrew
650			_aEngineering 2012
942			_cEB
999			_c24706 _d24706