000 00635nam a2200229Ia 4500
005 20241108143104.0
008 160330s9999||||xx |||||||||||||| ||und||
020 _a9788132204954
040 _aCentral Library-NITS
041 _aEnglish
082 _a620.5
_bCUI
100 _aCui, Zheng
245 _aNanofabrication: principles, capabilities and limits
_cby Zheng Cui
250 _a1st ed.
260 _aN. Delhi
_bSpringer India
_c2012
300 _ax,343p. .:ill.
365 _b1190.00
_cRs.
500 _aIncludes index
650 _aNanotechnology Electron beam lithography
650 _aNanofabrication
942 _cBK
999 _c30019
_d30019