000 00567nam a2200205Ia 4500
005 20250102155938.0
008 160330s9999||||xx |||||||||||||| ||und||
020 _a9781632383235
040 _aCentral Library-NITS
041 _aEnglish
082 _a621.381
_bMIC
245 _aMicroelectromechanical systems
_cedited by Eve Versuh
250 _aIllustrated ed.
260 _aNew York
_bNY RESEARCH PRESS
_c2015
300 _avi,192p.: ill
365 _b110.00
_c$
_eRs. 7524.00
500 _aIncludes index
650 _aMEMS
_aBioMEMS Devices,
942 _cBK
999 _c30483
_d30483