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040 _aCentral Library-NITS
041 _aEnglish
082 _a621.381
_bMIC
245 _aMicroelectromechanical systems: advanced technologies and devices
_cedited by Eve Versuh
250 _aIllustrated ed.
260 _aNew York
_bWillford Press
_c2016
300 _avi,274p.: ill
365 _b157.00
_c$
_eRs. 10738.00
500 _aIncludes index
650 _aMEMS
_aBioMEMS Devices
942 _cBK
999 _c30484
_d30484