000 00527nam a2200193Ia 4500
005 20250120163634.0
008 160330s9999||||xx |||||||||||||| ||und||
020 _a9789533070278
040 _aCentral Library-NITS
041 _aEnglish
082 _a621.381
_bELE
245 _aMicro electronic and mechanical systems
_cedited by Kenichi Takahata
250 _a1st ed.
260 _aCroatia
_bIntechopen
_c2016
300 _aix, 514p. :ill.
365 _b180.00
_c$
_eRs. 12312.00
650 _aECE
_aMEMs
942 _cBK
999 _c30665
_d30665